JPH0568641B2 - - Google Patents

Info

Publication number
JPH0568641B2
JPH0568641B2 JP58197836A JP19783683A JPH0568641B2 JP H0568641 B2 JPH0568641 B2 JP H0568641B2 JP 58197836 A JP58197836 A JP 58197836A JP 19783683 A JP19783683 A JP 19783683A JP H0568641 B2 JPH0568641 B2 JP H0568641B2
Authority
JP
Japan
Prior art keywords
head
combination
image
beam splitter
combination head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58197836A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6089702A (ja
Inventor
Keinosuke Kanejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19783683A priority Critical patent/JPS6089702A/ja
Publication of JPS6089702A publication Critical patent/JPS6089702A/ja
Publication of JPH0568641B2 publication Critical patent/JPH0568641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP19783683A 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒 Granted JPS6089702A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19783683A JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19783683A JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Publications (2)

Publication Number Publication Date
JPS6089702A JPS6089702A (ja) 1985-05-20
JPH0568641B2 true JPH0568641B2 (en]) 1993-09-29

Family

ID=16381146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19783683A Granted JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Country Status (1)

Country Link
JP (1) JPS6089702A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3107612A1 (de) * 1981-02-27 1982-09-16 Siemens AG, 1000 Berlin und 8000 München Laserspiegel, insbesondere laser-polygonspiegel
US4475794A (en) * 1982-02-03 1984-10-09 Martin Marietta Corporation Aluminum, aluminum oxide, cromium, gold mirror
JPH01116908U (en]) * 1988-02-01 1989-08-07

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655806U (en]) * 1979-10-02 1981-05-15

Also Published As

Publication number Publication date
JPS6089702A (ja) 1985-05-20

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